These recommended practices are produced by the AVS Recommended Practices Committee and published in JVST A. Many address instrumentation, including vacuum gauge calibration. Other topics include pumping performance and vacuum quality, component cleaning and outgassing, and safety, including pumping hazardous gases.
Instrumentation including gauge calibration
- Recommended practice for calibrating vacuum gauges of the ionization type, James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock, J. Vac. Sci. Technol. A 36, 030802 (2018), https://doi.org/10.1116/1.5025060
- Recommended practice for calibrating vacuum gauges of the thermal conductivity typeR. E. Ellefson, A. P. Miiller, J. Vac. Sci. Technol. A 18, 2568–2577 (2000), https://doi.org/10.1116/1.1286024
- Recommended Practice for the Calibration of Mass Spectrometers, James A. Basford, Mark D. Boeckmann, Robert E. Ellefson, Albert R. Filippelli, David H. Holkeboer, Laslo Lieszkovsky, Catherine M. Stupak, J. Vac. Sci. Technol. A 11, A22–A40 (1993) https://doi.org/10.1116/1.4755937
- Recommended practices for the calibration and use of capacitance diaphragm gages as transfer standards, Richard W. Hyland, Richard L. Shaffer, J. Vac. Sci. Technol. A 9, 2843–2863 (1991), https://doi.org/10.1116/1.577209
- Recommended practices for the calibration and use of leaks, Charles D. Ehrlich, James A. Basford, J. Vac. Sci. Technol. A 10, 1–17 (1992), https://doi.org/10.1116/1.578137
Pumping and Vacuum Quality, including leaks, outgassing and cleaning
- Recommended practices for measuring the performance and characteristics of closed-loop gaseous helium cryopumps, Kimo M. Welch, Bruce Andeen, Johan E. de Rijke, Christopher A. Foster, Marsbed H. Hablanian, Ralph C. Longsworth, William E. Millikin, Jr., Y. Tito Sasaki, Constantinos Tzemos, J. Vac. Sci. Technol. A 17, 3081–3095 (1999), https://doi.org/10.1116/1.582023
- Recommended practice for process sampling for partial pressure analysis, James E. Blessing, Robert E. Ellefson, Bruce A. Raby, Gerardo A. Brucker, Robert K. Waits, J. Vac. Sci. Technol. A 25, 167–186 (2007), https://doi.org/10.1116/1.2364001
- Recommended practices for measuring and reporting outgassing data, P. A. Redhead, J. Vac. Sci. Technol. A 20, 1667–1675 (2002) https://doi.org/10.1116/1.1496783
- A survey of vacuum material cleaning procedures: A subcommittee report of the American Vacuum Society Recommended Practices Committee, Y. Tito Sasaki, J. Vac. Sci. Technol. A 9, 2025–2035 (1991), https://doi.org/10.1116/1.577449
Safety – Pumping hazardous gases
- American Vacuum Society recommended practices for pumping hazardous gases, John F. O’Hanlon, David B. Fraser, J. Vac. Sci. Technol. A 6, 1226–1254 (1988), https://doi.org/10.1116/1.575683

