These standards are organized in four groupings: Vocabulary and Terminology, Pumps, Instrumentation (Gauges), Hardware (fittings, valves, flanges).
More information about ISO TC 112 Vacuum Technology can be found at https://www.iso.org/committee/51654.html, and the listing for current standards can be found at https://www.iso.org/committee/51654/x/catalogue/p/1/u/0/w/0/d/0.
Vocabulary and Terminology
• ISO 3529-1:2019 Vacuum technology — Vocabulary — Part 1: General terms
• ISO 3529-2:2020 Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms
• ISO 3529-3:2014 Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges
Pumps and Pumping
• ISO 1608-1:1993 Vapour vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)
• ISO 1608-2:1989 Vapour vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of critical backing pressure
• ISO 21360-1:2020 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description
• ISO 21360-2:2020 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps
• ISO 21360-3:2019 Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps
• ISO 21360-4:2018 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
• ISO 21360-5:2023 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps
• ISO 21360-6:2023 Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps
• ISO 27892:2010 Vacuum technology — Turbomolecular pumps — Measurement of rapid shutdown torque
Instrumentation (Gauges)
• ISO 3567:2011 Vacuum gauges — Calibration by direct comparison with a reference gauge
• ISO/TS 6737:2023 Vacuum technology — Vacuum gauges — Characteristics for a stable ionisation vacuum gauge
• ISO 14291:2012 Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers
• ISO 19685:2017 Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges
• ISO 20146:2019 Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
• ISO/TS 20175:2018 Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement
• ISO/TS 20177:2018 Vacuum technology — Vacuum gauges — Procedures to measure and report outgassing rates
• ISO 24477:2025 Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges
• ISO 27893:2011 Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
• ISO 27894:2009 Vacuum technology — Vacuum gauges — Specifications for hot cathode ionization gauges
Hardware (fittings, valves, flanges)
• ISO 1609:2020 Vacuum technology — Dimensions of non-knife edge flanges
• ISO 2861:2020 Vacuum technology — Dimensions of clamped-type quick-release couplings
• ISO 3669:2020 Vacuum technology — Dimensions of knife-edge flanges
• ISO 9803-1:2020 Vacuum technology — Mounting dimensions of pipeline fittings — Part 1: Non-knife-edge flange type
• ISO 9803-2:2020 Vacuum technology — Mounting dimensions of pipeline fittings — Part 2: Knife-edge flange type
• ISO 27895:2009 Vacuum technology — Valves — Leak test
• ISO 21358:2020 Vacuum technology — Right-angle valve — Dimensions and interfaces for pneumatic actuator